the "Download Data" / "Excel XLSX" option downloads 0K size file
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Similar case recently was T257453: Quarry's download as "Excel xlsx" creates an empty file last 2 days
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Mentioned in SAL (#wikimedia-cloud) [2020-09-03T17:14:09Z] <Framawiki> framawiki@quarry-web-01:/tmp$ find /tmp/* -mtime +360 -user www-data -exec sudo rm -v {} \; 775 files deleted for 10G. Again. T261909
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Indeed,
Due to T238375: quarry-web-01 leaks files in /tmp, there were 10G of tmp files in /tmp, making / (/dev/vda3) full, again. 775 files.
Thanks for the report, it should be good now.